Point of use gas purifiers

We know that gas purity is a top priority. Our point-of-use purifiers offer relatively low flow rates ranging from 0.1 slpm to 100 slpm. We provide state-of-the-art purifiers designed for ultra-high purity applications up to 9N. Where the impurity in the process gas must be a maximum of 100 PPT.

Applications of our point-of-use purifiers

Point-of-use purifiers are used by our clients in various areas:

• Research laboratories
• Flushing gas applications
• Semiconductor processes

To semiconductor fabs, we supply purifiers for process gases in various applications, including:

Versions of our point-of-use purifiers

Our point-of-use gas purifiers come in 3 different models:

• Vessel only purifiers. Work without the need for heat to remove impurities.
• In-line purifiers. Have heating, temperature indication and temperature control.
• Panel series purifiers. Offer advanced automation and integration.

Output purity

In this way, our point-of-use purifiers maintain process gas integrity in applications where ultra-high purity is required. We calculate an output impurity of 100 PPT or less at an input quality of 99.999% (5N).

Duration of use until regeneration or replacement

The dimensions of the purifier determine the ultimate service life. Based on the process parameters provided by you, we supply purifiers in dimensions based on a target lifespan of 2 years at a nominal flow rate of 24/7.

Photo: several point-of-use purifiers returning for regeneration.